The funding agreement with the U.S. Commerce Dept. was contingent on the company's recently announced pledge to invest $50 billion in the plants over the next five years.
The state funds are earmarked for construction at the Albany NanoTech Complex and purchase of advanced equipment for semiconductor chip research and development.
The tech equipment maker says the amount of its investment in the California project is contingent on the federal funding it receives via the Chips and Science Act.